Modeling and Simulation of a Micropump Chip using Dielectric Elastomer

290 Abstract— This paper aims to simulate dielectric elastomeric (DE) diaphragm for a micropump. First a theoretical study is done to compare the different actuation methods that are currently being used in this field. Then a circular DE diaphragm is modeled for a micropump. The material assumed for the micro diaphragm is 3M’s VHB 4910 (polyacrylic tapes available in the market). The thickness of the micro actuator (diaphragm) is 30μm and the diameter is 5mm. This material is simulated on FEA software using linear material model and out-of-plane deflections are measured. The pre-stretch effects are not considered during the simulation of DE diaphragm. The simulated diaphragm data are compared to the experimental data available in the literature for validation. The deflections are then used in the empirical formulas to calculate maximum actuation pressure, stresses in diaphragm and discharge of the pump.